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Inventor

CROWLEY DANIEL T

US8 patents
⚠️ This page may combine multiple inventors who share the name “CROWLEY DANIEL T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VIRATEC THIN FILMS INC

4 patents
US5571393ANov 5, 1996

Magnet housing for a sputtering cathode

VIRATEC THIN FILMS INC40 citations91
US5567289AOct 22, 1996

Rotating floating magnetron dark-space shield and cone end

VIRATEC THIN FILMS INC34 citations91
US5539272AJul 23, 1996

Rotating floating magnetron dark-space shield

VIRATEC THIN FILMS INC21 citations91
US5413688AMay 9, 1995

Shutter apparatus for a coating chamber viewport

VIRATEC THIN FILMS INC13 citations72

SPUTTERING COMPONENTS INC

2 patents
US6841051B2Jan 11, 2005

High-power ion sputtering magnetron

SPUTTERING COMPONENTS INC40 citations90
US6905579B2Jun 14, 2005

Cylindrical magnetron target and spindle apparatus

SPUTTERING COMPONENTS INC6 citations71

APPLIED MATERIALS INC

1 patent
US7905995B2Mar 15, 2011

Alternating current rotatable sputter cathode

APPLIED MATERIALS INC30 citations90

TRU VUE INC

1 patent
US7399385B2Jul 15, 2008

Alternating current rotatable sputter cathode

TRU VUE INC28 citations89