Inventor
FURUYA MASAAKI
JP32 patents
⚠️ This page may combine multiple inventors who share the name “FURUYA MASAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIBAURA MECHATRONICS CORP
14 patentsUS10319602B2Jun 11, 2019
Substrate treatment method and substrate treatment apparatus
SHIBAURA MECHATRONICS CORP2 citations73
US9679787B2Jun 13, 2017
Spin treatment apparatus
SHIBAURA MECHATRONICS CORP5 citations73
US9607865B2Mar 28, 2017
Substrate processing device and substrate processing method
SHIBAURA MECHATRONICS CORP2 citations72
US9553003B2Jan 24, 2017
Substrate processing device and substrate processing method
SHIBAURA MECHATRONICS CORP6 citations72
US11193850B2Dec 7, 2021
Heater pipe gas leak detecting device and heater pipe gas leak detecting method
SHIBAURA MECHATRONICS CORP0 citations57
US12412756B2Sep 9, 2025
Processing liquid supply device, substrate processing apparatus, and method for inspecting processing liquid supply device
SHIBAURA MECHATRONICS CORP0 citations52
US12347699B2Jul 1, 2025
Supply tank, supply device and supply system
SHIBAURA MECHATRONICS CORP0 citations52
US12318803B2Jun 3, 2025
Supply device and supply system
SHIBAURA MECHATRONICS CORP0 citations52
US12257595B2Mar 25, 2025
Processing liquid supply device, substrate processing apparatus, and processing liquid supply method
SHIBAURA MECHATRONICS CORP0 citations52
US11996310B2May 28, 2024
Substrate carrying apparatus
SHIBAURA MECHATRONICS CORP0 citations52
US10483151B2Nov 19, 2019
Substrate transfer apparatus, substrate processing apparatus, and substrate processing method
SHIBAURA MECHATRONICS CORP0 citations42
US9922861B2Mar 20, 2018
Substrate gripping device and substrate processing apparatus
SHIBAURA MECHATRONICS CORP0 citations42
US9454080B2Sep 27, 2016
Spin treatment apparatus
SHIBAURA MECHATRONICS CORP0 citations42
US10276406B2Apr 30, 2019
Substrate processing device and substrate processing method
SHIBAURA MECHATRONICS CORP0 citations41
SHINETSU CHEMICAL CO
9 patentsUS6686312B1Feb 3, 2004
Metallic copper catalyst and process for making organohalosilanes
SHINETSU CHEMICAL CO23 citations91
US6365766B1Apr 2, 2002
Metallic copper catalyst and process for the synthesis of organohalosilanes
SHINETSU CHEMICAL CO19 citations91
US6225490B1May 1, 2001
Continuous hydrolysis of organochlorosilanes
SHINETSU CHEMICAL CO18 citations82
US5475077ADec 12, 1995
Method for the preparation of diorganopolysiloxane end-blocked with silanolic hydroxy groups
SHINETSU CHEMICAL CO8 citations74
US6218562B1Apr 17, 2001
Process for preparing organohalosilanes
SHINETSU CHEMICAL CO8 citations72
US5312947AMay 17, 1994
Siloxane purification
SHINETSU CHEMICAL CO17 citations72
US5922893AJul 13, 1999
Method for preparing monosilanes from a high-boiling fraction formed as by-products in the direct synthesis of methylchlorosilanes
SHINETSU CHEMICAL CO10 citations70
US6768018B2Jul 27, 2004
Preparation of organohalosilanes
SHINETSU CHEMICAL CO4 citations62
US7015296B2Mar 21, 2006
Preparation of linear organosiloxane polymers
SHINETSU CHEMICAL CO3 citations61
FURUYA MASAAKI
4 patentsUS8998561B2Apr 7, 2015
Gripping device, transfer device, processing device, and manufacturing method for electronic device
FURUYA MASAAKI12 citations82
US8449710B2May 28, 2013
Sheet peeling machine and method for manufacturing display device
FURUYA MASAAKI10 citations80
US9330948B2May 3, 2016
Heater unit, fan filter unit, and substrate processing apparatus
FURUYA MASAAKI0 citations47
US9199805B2Dec 1, 2015
Processing system and processing method
FURUYA MASAAKI0 citations30