P

Inventor

FURUYA MASAAKI

JP32 patents
⚠️ This page may combine multiple inventors who share the name “FURUYA MASAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIBAURA MECHATRONICS CORP

14 patents
US10319602B2Jun 11, 2019

Substrate treatment method and substrate treatment apparatus

SHIBAURA MECHATRONICS CORP2 citations73
US9679787B2Jun 13, 2017

Spin treatment apparatus

SHIBAURA MECHATRONICS CORP5 citations73
US9607865B2Mar 28, 2017

Substrate processing device and substrate processing method

SHIBAURA MECHATRONICS CORP2 citations72
US9553003B2Jan 24, 2017

Substrate processing device and substrate processing method

SHIBAURA MECHATRONICS CORP6 citations72
US11193850B2Dec 7, 2021

Heater pipe gas leak detecting device and heater pipe gas leak detecting method

SHIBAURA MECHATRONICS CORP0 citations57
US12412756B2Sep 9, 2025

Processing liquid supply device, substrate processing apparatus, and method for inspecting processing liquid supply device

SHIBAURA MECHATRONICS CORP0 citations52
US12347699B2Jul 1, 2025

Supply tank, supply device and supply system

SHIBAURA MECHATRONICS CORP0 citations52
US12318803B2Jun 3, 2025

Supply device and supply system

SHIBAURA MECHATRONICS CORP0 citations52
US12257595B2Mar 25, 2025

Processing liquid supply device, substrate processing apparatus, and processing liquid supply method

SHIBAURA MECHATRONICS CORP0 citations52
US11996310B2May 28, 2024

Substrate carrying apparatus

SHIBAURA MECHATRONICS CORP0 citations52
US10483151B2Nov 19, 2019

Substrate transfer apparatus, substrate processing apparatus, and substrate processing method

SHIBAURA MECHATRONICS CORP0 citations42
US9922861B2Mar 20, 2018

Substrate gripping device and substrate processing apparatus

SHIBAURA MECHATRONICS CORP0 citations42
US9454080B2Sep 27, 2016

Spin treatment apparatus

SHIBAURA MECHATRONICS CORP0 citations42
US10276406B2Apr 30, 2019

Substrate processing device and substrate processing method

SHIBAURA MECHATRONICS CORP0 citations41

SHINETSU CHEMICAL CO

9 patents

FURUYA MASAAKI

4 patents

NIPPON PILLAR PACKING

1 patent

TOSHIBA KK

1 patent

SHIN ETSU CHEMICAL COL LTD

1 patent

CANON KK

1 patent

KONISHIROKU PHOTO IND

1 patent