Inventor
SEGAWA KAZUHIRO
JP19 patents
⚠️ This page may combine multiple inventors who share the name “SEGAWA KAZUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA MEMORY CORP
6 patentsUS11016391B2May 25, 2021
Light-exposure method, light-exposure control unit, and semiconductor device manufacturing method
TOSHIBA MEMORY CORP0 citations51
US10269661B2Apr 23, 2019
Manufacturing system for semiconductor device, method of manufacturing semiconductor device, and control device
TOSHIBA MEMORY CORP0 citations51
US10054856B2Aug 21, 2018
Exposure method, manufacturing method of device, and thin film sheet
TOSHIBA MEMORY CORP0 citations51
US9952505B2Apr 24, 2018
Imprint device and pattern forming method
TOSHIBA MEMORY CORP1 citations51
US9929103B2Mar 27, 2018
Misalignment checking device and manufacturing method of semiconductor device
TOSHIBA MEMORY CORP1 citations51
US9941177B2Apr 10, 2018
Pattern accuracy detecting apparatus and processing system
TOSHIBA MEMORY CORP0 citations37
HITACHI KOKI KK
5 patentsUS7704052B2Apr 27, 2010
Air compressor and method for controlling the same
HITACHI KOKI KK45 citations95
US7641449B2Jan 5, 2010
Air compressor having a controller for a variable speed motor and a compressed air tank
HITACHI KOKI KK46 citations92
USD343345SJan 18, 1994
Portable electric hammer
HITACHI KOKI KK36 citations90
US7017342B2Mar 28, 2006
Air compressor and control method therefor
HITACHI KOKI KK15 citations83
US7326038B2Feb 5, 2008
Pressure switch mechanism and air compressor using the same mechanism
HITACHI KOKI KK6 citations62
TOSHIBA KK
3 patentsUS9625831B1Apr 18, 2017
Exposure apparatus, exposure method and manufacturing method of semiconductor device
TOSHIBA KK12 citations83
US9396299B2Jul 19, 2016
Reticle mark arrangement method and nontransitory computer readable medium storing a reticle mark arrangement program
TOSHIBA KK0 citations51
US9239526B2Jan 19, 2016
Exposure apparatus and transfer characteristics measuring method
TOSHIBA KK0 citations41