Inventor

WONG YEE CHONG

ML2 patents

Patents

2 patents

US6406994B1Jun 18, 2002

Triple-layered low dielectric constant dielectric dual damascene approach

CHARTERED SEMICONDUCTOR MFG31 citations91

US6803314B2Oct 12, 2004

Double-layered low dielectric constant dielectric dual damascene method

CHARTERED SEMICONDUCTOR MFG5 citations57