Inventor

KOUMURA TOMOO

JP2 patents

Patents

2 patents

US6645264B2Nov 11, 2003

Composition for forming polishing pad, crosslinked body for polishing pad, polishing pad using the same and method for producing thereof

JSR CORP29 citations90

US7217179B2May 15, 2007

Polishing pad

JSR CORP21 citations89