Inventor
TKACH GEORGE
US3 patents
Patents
3 patentsUS6652718B1Nov 25, 2003
Use of RF biased ESC to influence the film properties of Ti and TiN
NOVELLUS SYSTEMS INC75 citations95
US6673716B1Jan 6, 2004
Control of the deposition temperature to reduce the via and contact resistance of Ti and TiN deposited using ionized PVD techniques
NOVELLUS SYSTEMS INC124 citations93
US6342133B2Jan 29, 2002
PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter
NOVELLUS SYSTEMS INC92 citations91