Inventor
RILEY NORMA
US11 patents
⚠️ This page may combine multiple inventors who share the name “RILEY NORMA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS5916369AJun 29, 1999
Gas inlets for wafer processing chamber
APPLIED MATERIALS INC117 citations96
US6562720B2May 13, 2003
Apparatus and method for surface finishing a silicon film
APPLIED MATERIALS INC99 citations95
US6489241B1Dec 3, 2002
Apparatus and method for surface finishing a silicon film
APPLIED MATERIALS INC110 citations95
US5198071AMar 30, 1993
Process for inhibiting slip and microcracking while forming epitaxial layer on semiconductor wafer
APPLIED MATERIALS INC65 citations95
US6083323AJul 4, 2000
Method for controlling the temperature of the walls of a reaction chamber during processing
APPLIED MATERIALS INC34 citations92
US5855677AJan 5, 1999
Method and apparatus for controlling the temperature of reaction chamber walls
APPLIED MATERIALS INC37 citations92
US6500734B2Dec 31, 2002
Gas inlets for wafer processing chamber
APPLIED MATERIALS INC45 citations91
US5322567AJun 21, 1994
Particulate reduction baffle with wafer catcher for chemical-vapor-deposition apparatus
APPLIED MATERIALS INC38 citations88
US5298107AMar 29, 1994
Processing method for growing thick films
APPLIED MATERIALS INC25 citations88