Inventor
GOTOH SUSUMU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “GOTOH SUSUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
6 patentsUS6323499B1Nov 27, 2001
Electron beam exposure apparatus and method, and device manufacturing method
CANON KK106 citations98
US5834783ANov 10, 1998
Electron beam exposure apparatus and method, and device manufacturing method
CANON KK143 citations98
US6166387ADec 26, 2000
Electron beam exposure apparatus and method
CANON KK65 citations95
US5973332AOct 26, 1999
Electron beam exposure method, and device manufacturing method using same
CANON KK73 citations95
US5164974ANov 17, 1992
X-ray exposure apparatus
CANON KK34 citations92
US7049607B2May 23, 2006
Electron beam writing equipment and electron beam writing method
CANON KK2 citations62