Inventor
ASAKAWA TERUO
JP32 patents
⚠️ This page may combine multiple inventors who share the name “ASAKAWA TERUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
26 patentsUS6053983AApr 25, 2000
Wafer for carrying semiconductor wafers and method detecting wafers on carrier
TOKYO ELECTRON LTD456 citations99
US5934856AAug 10, 1999
Multi-chamber treatment system
TOKYO ELECTRON LTD262 citations99
US6224679B1May 1, 2001
Controlling gas in a multichamber processing system
TOKYO ELECTRON LTD375 citations98
US5340261AAug 23, 1994
Load-lock unit and wafer transfer system
TOKYO ELECTRON LTD389 citations98
US5064337ANov 12, 1991
Handling apparatus for transferring carriers and a method of transferring carriers
TOKYO ELECTRON LTD485 citations98
US5460684AOct 24, 1995
Stage having electrostatic chuck and plasma processing apparatus using same
TOKYO ELECTRON LTD208 citations96
US5374147ADec 20, 1994
Transfer device for transferring a substrate
TOKYO ELECTRON LTD90 citations96
US4986715AJan 22, 1991
Stock unit for storing carriers
TOKYO ELECTRON LTD78 citations96
US5405230AApr 11, 1995
Load-lock unit and wafer transfer system
TOKYO ELECTRON LTD68 citations95
US6841485B1Jan 11, 2005
Method of manufacturing semiconductor device and manufacturing line thereof
TOKYO ELECTRON LTD28 citations92
US6802934B2Oct 12, 2004
Processing apparatus
TOKYO ELECTRON LTD33 citations92
US6285102B1Sep 4, 2001
Drive mechanism having a gas bearing operable under a negative pressure environment
TOKYO ELECTRON LTD48 citations92
US5382803AJan 17, 1995
Ion injection device
TOKYO ELECTRON LTD37 citations92
US4626749ADec 2, 1986
Two-dimensional positioning device
TOKYO ELECTRON LTD36 citations92
US5435683AJul 25, 1995
Load-lock unit and wafer transfer system
TOKYO ELECTRON LTD38 citations91
US5357115AOct 18, 1994
Processing method for wafers
TOKYO ELECTRON LTD35 citations90
US5248886ASep 28, 1993
Processing system
TOKYO ELECTRON LTD36 citations90
US5754780AMay 19, 1998
Apparatus and method for performing serial communication between master and slave devices
TOKYO ELECTRON LTD48 citations89
US8025473B2Sep 27, 2011
Carrying system, substrate treating device, and carrying method
TOKYO ELECTRON LTD10 citations84
US5947677ASep 7, 1999
Cassette transfer mechanism
TOKYO ELECTRON LTD18 citations84
US5857827AJan 12, 1999
Cassette chamber
TOKYO ELECTRON LTD19 citations83
US6068704AMay 30, 2000
Transfer arm apparatus and semiconductor processing system using the same
TOKYO ELECTRON LTD9 citations74
US6013112AJan 11, 2000
Relay apparatus for relaying object to be treated
TOKYO ELECTRON LTD14 citations72
US7566665B2Jul 28, 2009
Semiconductor device manufacturing method and manufacturing line thereof
TOKYO ELECTRON LTD4 citations63
US6988867B2Jan 24, 2006
Transfer apparatus
TOKYO ELECTRON LTD3 citations63
US9639686B2May 2, 2017
Operation limiting device, operation limiting method, and storage medium
TOKYO ELECTRON LTD0 citations31
TELMEC CO LTD
4 patentsUS4535278AAug 13, 1985
Two-dimensional precise positioning device for use in a semiconductor manufacturing apparatus
TELMEC CO LTD199 citations99
US4525659AJun 25, 1985
Positioning stage having a vibration suppressor
TELMEC CO LTD102 citations96
US4555650ANov 26, 1985
Two dimensional driving device for use in a positioning device in a semiconductor manufacturing apparatus
TELMEC CO LTD41 citations92
US4476420AOct 9, 1984
Circuit arrangement for synthesizing a sinusoidal position signal having a desired phase and high-resolution positioning system making use of the circuit arrangement
TELMEC CO LTD11 citations74
ASAKAWA TERUO
2 patentsUS9268328B2Feb 23, 2016
Production efficiency improving apparatus, production efficiency improving method, and computer program
ASAKAWA TERUO2 citations57
US9696711B2Jul 4, 2017
Processing instructing device, processing instructing method, computer program and processing device
ASAKAWA TERUO1 citations41