Inventor
NEBUKA KENJI
JP4 patents
Patents
4 patentsUS5340261AAug 23, 1994
Load-lock unit and wafer transfer system
TOKYO ELECTRON LTD389 citations98
US5753891AMay 19, 1998
Treatment apparatus
TOKYO ELECTRON LTD74 citations95
US5405230AApr 11, 1995
Load-lock unit and wafer transfer system
TOKYO ELECTRON LTD68 citations95
US5435683AJul 25, 1995
Load-lock unit and wafer transfer system
TOKYO ELECTRON LTD38 citations91