Inventor
JASPER JOHANNES CHRISTIAAN MAR
NL5 patents
Patents
5 patentsUS7206058B2Apr 17, 2007
Off-axis levelling in lithographic projection apparatus
ASML NETHERLANDS BV20 citations91
US6882405B2Apr 19, 2005
Off-axis levelling in lithographic projection apparatus
ASML NETHERLANDS BV13 citations90
US7224431B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations82
US7239370B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations71
US7310131B2Dec 18, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations59