Inventor
VERMEULEN JOHANNES PETRUS MART
NL6 patents
⚠️ This page may combine multiple inventors who share the name “VERMEULEN JOHANNES PETRUS MART”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS6740891B2May 25, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV26 citations89
US7084953B2Aug 1, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV2 citations59
US7576831B2Aug 18, 2009
Method and apparatus for maintaining a machine part
ASML NETHERLANDS BV2 citations58
US7105955B2Sep 12, 2006
Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method
ASML NETHERLANDS BV2 citations58
US7397040B2Jul 8, 2008
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV0 citations48