Inventor
FRIZ ALEXANDER
US11 patents
⚠️ This page may combine multiple inventors who share the name “FRIZ ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7130049B2Oct 31, 2006
Method of measurement, method for providing alignment marks, and device manufacturing method
ASML NETHERLANDS BV10 citations72
US7501215B2Mar 10, 2009
Device manufacturing method and a calibration substrate
ASML NETHERLANDS BV3 citations61
US7410880B2Aug 12, 2008
Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrate
ASML NETHERLANDS BV2 citations61
US7019814B2Mar 28, 2006
Lithographic projection mask, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations61
US6914664B2Jul 5, 2005
Lithographic apparatus, alignment method and device manufacturing method
ASML NETHERLANDS BV5 citations61
US7041996B2May 9, 2006
Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured thereby
ASML NETHERLANDS BV0 citations49
US7320847B2Jan 22, 2008
Alternate side lithographic substrate imaging
ASML NETHERLANDS BV0 citations40