Inventor

CATEY ERIC B

US2 patents

⚠️ This page may combine multiple inventors who share the name “CATEY ERIC B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SILICON VALLEY GROUP

1 patent

US6239863B1May 29, 2001

Removable cover for protecting a reticle, system including and method of using the same

SILICON VALLEY GROUP103 citations92

ASML HOLDING NV

1 patent

US7525641B2Apr 28, 2009

System and method for uniformity correction

ASML HOLDING NV6 citations69