Inventor

HULT DAVID A

US5 patents

⚠️ This page may combine multiple inventors who share the name “HULT DAVID A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

3 patents

US7525641B2Apr 28, 2009

HULT DAVID A

2 patents

US8059266B2Nov 15, 2011

Radiometric Kirk test

HULT DAVID A1 citations45

US8085383B2Dec 27, 2011

System, method, and apparatus for scanning detector for fast and frequent illumination uniformity correction module

HULT DAVID A0 citations41

HULT DAVID A

ASML HOLDING NV

System and method for uniformity correction

Method and system for real time uniformity feedback

Residual pupil asymmetry compensator for a lithography scanner

HULT DAVID A

Radiometric Kirk test

System, method, and apparatus for scanning detector for fast and frequent illumination uniformity correction module