Inventor
VAN GREEVENBROEK HENDRIKUS ROB
NL6 patents
⚠️ This page may combine multiple inventors who share the name “VAN GREEVENBROEK HENDRIKUS ROB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7038763B2May 2, 2006
Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV65 citations96
US7375799B2May 20, 2008
Lithographic apparatus
ASML NETHERLANDS BV24 citations89
US7170587B2Jan 30, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV11 citations83
US6710856B2Mar 23, 2004
Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby
ASML NETHERLANDS BV17 citations82
US7697116B2Apr 13, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations62