Inventor

TANNO MASUO

JP7 patents

Patents

7 patents

US4912065AMar 27, 1990

Plasma doping method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD171 citations98

US4937205AJun 26, 1990

Plasma doping process and apparatus therefor

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD160 citations96

US5360106ANov 1, 1994

Method for transporting/storing wafer and wafer carrier

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD19 citations82

US4906347AMar 6, 1990

Dry-etching apparatus

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations73

US4678539AJul 7, 1987

Dry-etching method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD18 citations72

US5502953AApr 2, 1996

Method for transporting/storing a wafer in a wafer carrier

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations62

US4612099ASep 16, 1986

Reactive ion etching method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations62