Inventor
TAKASE KAZUHIKO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TAKASE KAZUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
6 patentsUS5810940ASep 22, 1998
Method for cleaning semiconductor wafers
TOSHIBA KK81 citations94
US6152153ANov 28, 2000
Substrate cleaning/drying equipment and substrate cleaning/drying method
TOSHIBA KK28 citations91
US5744402AApr 28, 1998
Method of manufacturing semiconductor devices
TOSHIBA KK26 citations91
US7700490B2Apr 20, 2010
Semiconductor manufacturing method for removing residue generated by dry etching
TOSHIBA KK2 citations61
US7632358B2Dec 15, 2009
Cleaning method and a cleaning device for cleaning an edge portion and back face of a wafer
TOSHIBA KK3 citations61
US7776754B2Aug 17, 2010
Semiconductor device manufacturing method and chemical fluid used for manufacturing semiconductor device
TOSHIBA KK0 citations40