Inventor
PHILLIPPS GEOFFREY NORMAN
NL3 patents
Patents
3 patentsUS7562686B2Jul 21, 2009
Method and system for 3D alignment in wafer scale integration
ASML NETHERLANDS BV10 citations80
US7879514B2Feb 1, 2011
Lithographic method and patterning device
ASML NETHERLANDS BV3 citations57
US7398177B2Jul 8, 2008
Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification method
ASML NETHERLANDS BV0 citations47