Inventor
PELLENS RUDY JAN MARIA
BE7 patents
⚠️ This page may combine multiple inventors who share the name “PELLENS RUDY JAN MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7892903B2Feb 22, 2011
Device manufacturing method and substrate comprising multiple resist layers
ASML NETHERLANDS BV2 citations58
US7879514B2Feb 1, 2011
Lithographic method and patterning device
ASML NETHERLANDS BV3 citations57
US7494828B2Feb 24, 2009
Substrate holder and device manufacturing method
ASML NETHERLANDS BV2 citations55
US7626681B2Dec 1, 2009
Lithographic apparatus and method
ASML NETHERLANDS BV3 citations49
US9823576B2Nov 21, 2017
Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method
ASML NETHERLANDS BV0 citations46