Inventor
KIM HONG-SEUB
KR10 patents
⚠️ This page may combine multiple inventors who share the name “KIM HONG-SEUB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JUSUNG ENG CO LTD
7 patentsUS6770836B2Aug 3, 2004
Impedance matching circuit for inductively coupled plasma source
JUSUNG ENG CO LTD25 citations89
US6847516B2Jan 25, 2005
Electrostatic chuck for preventing an arc
JUSUNG ENG CO LTD16 citations81
US7156950B2Jan 2, 2007
Gas diffusion plate for use in ICP etcher
JUSUNG ENG CO LTD9 citations71
US6653988B2Nov 25, 2003
Parallel resonance whirl antenna
JUSUNG ENG CO LTD5 citations60
US7866341B2Jan 11, 2011
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
JUSUNG ENG CO LTD0 citations45
US7695231B2Apr 13, 2010
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
JUSUNG ENG CO LTD0 citations45
US6685800B2Feb 3, 2004
Apparatus for generating inductively coupled plasma
JUSUNG ENG CO LTD0 citations37