Inventor

ZIN KELVIN

US3 patents

⚠️ This page may combine multiple inventors who share the name “ZIN KELVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE YAO-SHENG

1 patent

US8252192B2Aug 28, 2012

Method of pattern etching a dielectric film while removing a mask layer

LEE YAO-SHENG9 citations81

TOKYO ELECTRON LTD

1 patent

US7637269B1Dec 29, 2009

Low damage method for ashing a substrate using CO2/CO-based process

TOKYO ELECTRON LTD17 citations80

ZIN KELVIN

1 patent

US8435901B2May 7, 2013

Method of selectively etching an insulation stack for a metal interconnect

ZIN KELVIN9 citations73