Inventor
LATZ RUDOLF
DE12 patents
Patents
12 patentsUS5169509ADec 8, 1992
Apparatus for the reactive coating of a substrate
LEYBOLD AG107 citations95
US4931169AJun 5, 1990
Apparatus for coating a substrate with dielectrics
LEYBOLD AG85 citations95
US5556520ASep 17, 1996
Method for controlling a reactive sputtering process
LEYBOLD AG25 citations92
US5417834AMay 23, 1995
Arrangement for generating a plasma by means of cathode sputtering
LEYBOLD AG39 citations92
US5244559ASep 14, 1993
Apparatus for transport and heat treatment of substrates
LEYBOLD AG29 citations92
US5026471AJun 25, 1991
Device for coating a substrate
LEYBOLD AG49 citations92
US5006219AApr 9, 1991
Microwave cathode sputtering arrangement
LEYBOLD AG32 citations92
US4954201ASep 4, 1990
Apparatus for etching substrates with a luminous discharge
LEYBOLD AG22 citations80
US5531877AJul 2, 1996
Microwave-enhanced sputtering configuration
LEYBOLD AG12 citations73
US5478459ADec 26, 1995
Plasma sputtering installation with microwave enhancement
LEYBOLD AG16 citations73
US5397448AMar 14, 1995
Device for generating a plasma by means of cathode sputtering and microwave-irradiation
LEYBOLD AG15 citations73
US5167789ADec 1, 1992
Apparatus for coating a substrate
LEYBOLD AG17 citations73