Inventor
TO BANG N
US4 patents
Patents
4 patentsUS9171796B1Oct 27, 2015
Sidewall image transfer for heavy metal patterning in integrated circuits
IBM5 citations71
US9711365B2Jul 18, 2017
Etch rate enhancement for a silicon etch process through etch chamber pretreatment
IBM3 citations70
US10167443B2Jan 1, 2019
Wet clean process for removing CxHyFz etch residue
IBM0 citations51
US9536731B2Jan 3, 2017
Wet clean process for removing CxHyFz etch residue
IBM0 citations51