Inventor

CHIOU TSANN-BIM

TW3 patents

⚠️ This page may combine multiple inventors who share the name “CHIOU TSANN-BIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

Cymer LLC

1 patent

US10416566B2Sep 17, 2019

Optimization of source and bandwidth for new and existing patterning devices

Cymer LLC3 citations68

ASML NETHERLANDS BV

1 patent

US8945800B2Feb 3, 2015

Method of preparing a pattern, method of forming a mask set, device manufacturing method and computer program

ASML NETHERLANDS BV3 citations58

HANSEN STEVEN GEORGE

1 patent

US9563135B2Feb 7, 2017

Process tuning with polarization

HANSEN STEVEN GEORGE0 citations38