Inventor
FAN CHENG-LI
TW8 patents
Patents
8 patentsUS10347506B2Jul 9, 2019
Multiple patterning method using mask portions to etch semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US10861705B2Dec 8, 2020
Reduction of line wiggling
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations82
US11244858B2Feb 8, 2022
Etching to reduce line wiggling
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10535532B2Jan 14, 2020
Multiple patterning method using mask portions to etch semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11594419B2Feb 28, 2023
Reduction of line wiggling
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12424448B2Sep 23, 2025
Reduction of line wiggling
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12322651B2Jun 3, 2025
Etching to reduce line wiggling
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10475700B2Nov 12, 2019
Etching to reduce line wiggling
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40