Inventor

KAMMINGA JELMER MATTHEÜS

NL2 patents

Patents

2 patents

US11664264B2May 30, 2023

Lithographic apparatus, method for unloading a substrate and method for loading a substrate

ASML NETHERLANDS BV2 citations66

US10088756B2Oct 2, 2018

Lithographic apparatus and method

ASML NETHERLANDS BV0 citations36