Inventor

SCHREUDER ANDRÉ

NL4 patents

Patents

4 patents

US11664264B2May 30, 2023

Lithographic apparatus, method for unloading a substrate and method for loading a substrate

ASML NETHERLANDS BV2 citations66

US12386273B2Aug 12, 2025

Substrate holder, lithographic apparatus and method

ASML NETHERLANDS BV0 citations42

US11556064B2Jan 17, 2023

Stage apparatus and method for calibrating an object loading process

ASML NETHERLANDS BV0 citations40

US12243768B2Mar 4, 2025

Substrate holder for use in a lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV0 citations36