Inventor
MC NAMARA ELLIOTT GERARD
NL3 patents
⚠️ This page may combine multiple inventors who share the name “MC NAMARA ELLIOTT GERARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
2 patentsUS12468235B2Nov 11, 2025
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV0 citations60
US10895811B2Jan 19, 2021
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations45