Inventor
YE WEIFENG
US13 patents
⚠️ This page may combine multiple inventors who share the name “YE WEIFENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS9105695B2Aug 11, 2015
Cobalt selectivity improvement in selective cobalt process sequence
APPLIED MATERIALS INC6 citations84
US10043709B2Aug 7, 2018
Methods for thermally forming a selective cobalt layer
APPLIED MATERIALS INC5 citations73
US10109520B2Oct 23, 2018
Methods for depositing dielectric barrier layers and aluminum containing etch stop layers
APPLIED MATERIALS INC2 citations72
US9633861B2Apr 25, 2017
Cu/barrier interface enhancement
APPLIED MATERIALS INC3 citations72
US9580801B2Feb 28, 2017
Enhancing electrical property and UV compatibility of ultrathin blok barrier film
APPLIED MATERIALS INC3 citations72
US9478460B2Oct 25, 2016
Cobalt selectivity improvement in selective cobalt process sequence
APPLIED MATERIALS INC2 citations62
US10707122B2Jul 7, 2020
Methods for depositing dielectric barrier layers and aluminum containing etch stop layers
APPLIED MATERIALS INC0 citations51
US10546742B2Jan 28, 2020
Method to reduce trap-induced capacitance in interconnect dielectric barrier stack
APPLIED MATERIALS INC0 citations51
US10170299B2Jan 1, 2019
Method to reduce trap-induced capacitance in interconnect dielectric barrier stack
APPLIED MATERIALS INC0 citations51
US12565702B2Mar 3, 2026
Method of selective metal deposition using separated reactant activation and plasma discharging zone
APPLIED MATERIALS INC0 citations49
US12588443B2Mar 24, 2026
Methods for forming low resistivity contacts
APPLIED MATERIALS INC0 citations48
US12538542B2Jan 27, 2026
Method of forming a MEOL contact structure
APPLIED MATERIALS INC0 citations47