Inventor
WAN YIYANG
US4 patents
Patents
4 patentsUS11664229B2May 30, 2023
Nitride capping of titanium material to improve barrier properties
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Method of selective metal deposition using separated reactant activation and plasma discharging zone
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US12588443B2Mar 24, 2026
Methods for forming low resistivity contacts
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US12538542B2Jan 27, 2026
Method of forming a MEOL contact structure
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