Inventor
KUEHNE STEPHEN CARL
US4 patents
⚠️ This page may combine multiple inventors who share the name “KUEHNE STEPHEN CARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
3 patentsUS6162711ADec 19, 2000
In-situ boron doped polysilicon with dual layer and dual grain structure for use in integrated circuits manufacturing
LUCENT TECHNOLOGIES INC110 citations93
US6146975ANov 14, 2000
Shallow trench isolation
LUCENT TECHNOLOGIES INC40 citations91
US5950096ASep 7, 1999
Process for improving device yield in integrated circuit fabrication
LUCENT TECHNOLOGIES INC12 citations70