Inventor
MACHIDA HIDEAKI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MACHIDA HIDEAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TRI CHEMICAL LAB INC
5 patentsUS5663391ASep 2, 1997
Manufacturing process for producing a β copper diketone complex
TRI CHEMICAL LAB INC12 citations69
US7045457B2May 16, 2006
Film forming material, film forming method, and silicide film
TRI CHEMICAL LAB INC5 citations60
US5468894ANov 21, 1995
Method of manufacturing FSi(OR)3
TRI CHEMICAL LAB INC5 citations53
US6773750B2Aug 10, 2004
Chemical vapor deposition method and related material
TRI CHEMICAL LAB INC0 citations51
US7312140B2Dec 25, 2007
Film forming method
TRI CHEMICAL LAB INC1 citations50