Inventor
TAGUCHI CHIHIRO
JP3 patents
Patents
3 patentsUS7067178B2Jun 27, 2006
Substrate table, production method therefor and plasma treating device
TOKYO ELECTRON LTD20 citations90
US6492612B1Dec 10, 2002
Plasma apparatus and lower electrode thereof
TOKYO ELECTRON LTD49 citations89
US7544393B2Jun 9, 2009
Substrate table, production method therefor and plasma treating device
TOKYO ELECTRON LTD2 citations60