Inventor
MIGITA YASUSHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “MIGITA YASUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KYOCERA CORP
4 patentsUS7651571B2Jan 26, 2010
Susceptor
KYOCERA CORP20 citations89
US7068489B2Jun 27, 2006
Electrostatic chuck for holding wafer
KYOCERA CORP19 citations89
US6643115B2Nov 4, 2003
Electrostatic chuck
KYOCERA CORP11 citations65
US7646580B2Jan 12, 2010
Electrostatic chuck and wafer holding member and wafer treatment method
KYOCERA CORP6 citations60