Inventor
TAKATSU KEI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “TAKATSU KEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONY CORP
4 patentsUS6120661ASep 19, 2000
Apparatus for processing glass substrate
SONY CORP87 citations97
US6391437B1May 21, 2002
Composite material and manufacturing method thereof, substrate processing apparatus and manufacturing method thereof, substrate mounting stage and manufacturing method thereof, and substrate processing method
SONY CORP24 citations92
US6668905B1Dec 30, 2003
Aluminum nitride/aluminum base composite material and method of producing the same
SONY CORP10 citations73
US6805973B2Oct 19, 2004
Aluminum nitride/aluminum base composite material and a method for producing thereof
SONY CORP3 citations62