Inventor
GRUNES HOWARD
US16 patents
Patents
16 patentsUS5447409ASep 5, 1995
Robot assembly
APPLIED MATERIALS INC144 citations99
US5186718AFeb 16, 1993
Staged-vacuum wafer processing system and method
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US5690795ANov 25, 1997
Screwless shield assembly for vacuum processing chambers
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US5228501AJul 20, 1993
Physical vapor deposition clamping mechanism and heater/cooler
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US6368469B1Apr 9, 2002
Coils for generating a plasma and for sputtering
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US5763851AJun 9, 1998
Slotted RF coil shield for plasma deposition system
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US5810931ASep 22, 1998
High aspect ratio clamp ring
APPLIED MATERIALS INC78 citations95
US6799939B2Oct 5, 2004
Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
APPLIED MATERIALS INC16 citations92
US6783639B2Aug 31, 2004
Coils for generating a plasma and for sputtering
APPLIED MATERIALS INC21 citations92
US6254746B1Jul 3, 2001
Recessed coil for generating a plasma
APPLIED MATERIALS INC47 citations92
US5879127AMar 9, 1999
Robot assembly
APPLIED MATERIALS INC22 citations92
US5868847AFeb 9, 1999
Clamp ring for shielding a substrate during film layer deposition
APPLIED MATERIALS INC34 citations92
US5484011AJan 16, 1996
Method of heating and cooling a wafer during semiconductor processing
APPLIED MATERIALS INC52 citations91
US5857368AJan 12, 1999
Apparatus and method for fabricating metal paths in semiconductor substrates through high pressure extrusion
APPLIED MATERIALS INC37 citations89
US7422637B2Sep 9, 2008
Processing chamber configured for uniform gas flow
APPLIED MATERIALS INC14 citations84
US5678980AOct 21, 1997
Robot assembly
APPLIED MATERIALS INC13 citations74