Inventor
BESSHO YUKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “BESSHO YUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
14 patentsUS6001760ADec 14, 1999
Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck
NGK INSULATORS LTD143 citations97
US5728635AMar 17, 1998
Aluminum nitride sintered bodies
NGK INSULATORS LTD44 citations95
US6174583B1Jan 16, 2001
Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member
NGK INSULATORS LTD24 citations92
US5998320ADec 7, 1999
Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member
NGK INSULATORS LTD21 citations92
US5908799AJun 1, 1999
Apparatus for producing semiconductor using aluminum nitride bodies as substrates
NGK INSULATORS LTD25 citations92
US7019438B2Mar 28, 2006
Piezoelectric/electrostrictive film device
NGK INSULATORS LTD17 citations84
US6761028B2Jul 13, 2004
Drive device
NGK INSULATORS LTD18 citations84
US7267840B2Sep 11, 2007
Manufacturing method of piezoelectric/electrostrictive film type device
NGK INSULATORS LTD16 citations83
US7504070B2Mar 17, 2009
Micro reactor
NGK INSULATORS LTD3 citations62
US7067961B2Jun 27, 2006
Piezoelectric/electrostrictive film device, and manufacturing method of the device
NGK INSULATORS LTD6 citations62
US8038929B2Oct 18, 2011
Method of making a molded body using a chopper blade and a planetary blade
NGK INSULATORS LTD0 citations52
US7824781B2Nov 2, 2010
Metal phosphate composite and dense material comprised of the same
NGK INSULATORS LTD0 citations52
US7473391B2Jan 6, 2009
Methods for making molding material, molded body, and sintered body
NGK INSULATORS LTD0 citations52
US7518131B2Apr 14, 2009
Electron beam irradiating apparatus
NGK INSULATORS LTD0 citations42