Inventor
MORI YUKIMASA
JP6 patents
Patents
6 patentsUS6001760ADec 14, 1999
Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck
NGK INSULATORS LTD143 citations97
US5728635AMar 17, 1998
Aluminum nitride sintered bodies
NGK INSULATORS LTD44 citations95
US6174583B1Jan 16, 2001
Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member
NGK INSULATORS LTD24 citations92
US5998320ADec 7, 1999
Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member
NGK INSULATORS LTD21 citations92
US5908799AJun 1, 1999
Apparatus for producing semiconductor using aluminum nitride bodies as substrates
NGK INSULATORS LTD25 citations92
US8366893B2Feb 5, 2013
Pumping electrode of gas sensor, method of manufacturing conductive paste, and gas sensor
NGK INSULATORS LTD4 citations60