Inventor
MURRELL ADRIAN
GB13 patents
Patents
13 patentsUS6908836B2Jun 21, 2005
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC26 citations92
US6956223B2Oct 18, 2005
Multi-directional scanning of movable member and ion beam monitoring arrangement therefor
APPLIED MATERIALS INC24 citations91
US6818909B2Nov 16, 2004
Ion sources for ion implantation apparatus
APPLIED MATERIALS INC38 citations89
US6686601B2Feb 3, 2004
Ion sources for ion implantation apparatus
APPLIED MATERIALS INC24 citations89
US7838849B2Nov 23, 2010
Ion implanters
APPLIED MATERIALS INC8 citations82
US7282427B1Oct 16, 2007
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC11 citations82
US7049210B2May 23, 2006
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC11 citations82
US7253424B2Aug 7, 2007
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC6 citations72
US7351986B2Apr 1, 2008
Method and apparatus for reducing cross contamination of species during ion implantation
APPLIED MATERIALS INC2 citations62
US7235797B2Jun 26, 2007
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC3 citations62
US7611975B2Nov 3, 2009
Method of implanting a substrate and an ion implanter for performing the method
APPLIED MATERIALS INC5 citations61
US7928413B2Apr 19, 2011
Ion implanters
APPLIED MATERIALS INC4 citations60
US7807984B2Oct 5, 2010
Ion implanters
APPLIED MATERIALS INC2 citations57