Inventor
SUGIMOTO FUMITOSHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SUGIMOTO FUMITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
4 patentsUS5562529AOct 8, 1996
Apparatus and method for uniformly polishing a wafer
FUJITSU LTD119 citations97
US5413951AMay 9, 1995
Composite semiconductor substrate and a fabrication process thereof
FUJITSU LTD73 citations95
US5506433AApr 9, 1996
Composite semiconductor substrate having a single crystal substrate and a single crystal layer formed thereon
FUJITSU LTD17 citations81
US5017998AMay 21, 1991
Semiconductor device using SOI substrate
FUJITSU LTD11 citations73
FUJITSU SEMICONDUCTOR LTD
4 patentsUS7887977B2Feb 15, 2011
Exposure mask, its manufacture method, pattern transfer method, pattern forming method, and SRAM manufacture method
FUJITSU SEMICONDUCTOR LTD2 citations60
US9148167B2Sep 29, 2015
Capacitor array, AD converter and semiconductor device
FUJITSU SEMICONDUCTOR LTD1 citations51
US7820364B2Oct 26, 2010
Semiconductor device manufacturing method, mask manufacturing method, and exposure method
FUJITSU SEMICONDUCTOR LTD0 citations50
US7741016B2Jun 22, 2010
Method for fabricating semiconductor device and exposure mask
FUJITSU SEMICONDUCTOR LTD0 citations39