Inventor
SHIMIZU SUMITO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SHIMIZU SUMITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
5 patentsUS6108096AAug 22, 2000
Light absorption measurement apparatus and methods
NIKON CORP43 citations92
US6440615B1Aug 27, 2002
Method of repairing a mask with high electron scattering and low electron absorption properties
NIKON CORP38 citations90
US6972417B2Dec 6, 2005
Apparatus and methods for patterning a reticle blank by electron-beam inscription with reduced exposure of the reticle blank by backscattered electrons
NIKON CORP7 citations70
US6074513AJun 13, 2000
Etching apparatus and method for manufacturing optical devices
NIKON CORP1 citations49
US6756182B2Jun 29, 2004
Charged-particle-beam microlithography methods exhibiting reduced coulomb effects
NIKON CORP0 citations40