Inventor
PIERRO JOSEPH E
US4 patents
Patents
4 patentsUS9978554B1May 22, 2018
Dual cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC9 citations82
US10446372B2Oct 15, 2019
Dual cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US11114277B2Sep 7, 2021
Dual cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations61
US10741361B2Aug 11, 2020
Dual cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations50