Inventor
MUNEMASA JUN
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MUNEMASA JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOBE STEEL LTD
5 patentsUS5269896ADec 14, 1993
Cathodic arc deposition system
KOBE STEEL LTD47 citations90
US5896012AApr 20, 1999
Metal ion plasma generator having magnetic field forming device located such that a triggering is between the magnetic field forming device and an anode
KOBE STEEL LTD13 citations70
US5404017AApr 4, 1995
Ion implantation apparatus
KOBE STEEL LTD13 citations65
US7335596B2Feb 26, 2008
Method for fabricating copper-based interconnections for semiconductor device
KOBE STEEL LTD3 citations61
US5859500AJan 12, 1999
Metal ion plasma generator having rotatable anode plate
KOBE STEEL LTD3 citations59