Inventor

LIU HELEN (HENG)

US4 patents

⚠️ This page may combine multiple inventors who share the name “LIU HELEN (HENG)”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA CORP

3 patents

US11035665B2Jun 15, 2021

System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage

KLA CORP2 citations69

US11668557B2Jun 6, 2023

System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage

KLA CORP0 citations58

US11017520B2May 25, 2021

Multi-wavelength interferometry for defect classification

KLA CORP0 citations47

KLA TENCOR CORP

1 patent

US10585049B2Mar 10, 2020

Process-induced excursion characterization

KLA TENCOR CORP0 citations48