Inventor
LIN HU-WEI
TW8 patents
Patents
8 patentsUS10283457B2May 7, 2019
Method for lithographically forming wafer identification marks and alignment marks
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US10283456B2May 7, 2019
Lithography engraving machine for forming water identification marks and aligment marks
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US9720325B2Aug 1, 2017
Photoresist coating scheme
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations65
US11562968B2Jan 24, 2023
Apparatus for lithographically forming wafer identification marks and alignment marks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12367569B2Jul 22, 2025
Automatic optical inspection system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US9097972B2Aug 4, 2015
Method of applying photoresist to a semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US12322608B2Jun 3, 2025
Apparatus and methods for cleaning a package
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9575012B2Feb 21, 2017
Automated wafer inspection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45