Inventor
HOSAKA YUKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “HOSAKA YUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS11804366B2Oct 31, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US11101114B2Aug 24, 2021
Plasma processing apparatus
TOKYO ELECTRON LTD3 citations71
US10192774B2Jan 29, 2019
Temperature control device for processing target object and method of selectively etching nitride film from multilayer film
TOKYO ELECTRON LTD2 citations71
US12374531B2Jul 29, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD1 citations60
US12518947B2Jan 6, 2026
Plasma processing apparatus and plasma processing coil
TOKYO ELECTRON LTD0 citations50
US12347654B2Jul 1, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations49
US11348768B2May 31, 2022
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations49
US10950467B2Mar 16, 2021
Gas supply mechanism and semiconductor manufacturing system
TOKYO ELECTRON LTD0 citations46
US12334313B2Jun 17, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations44
US10541142B2Jan 21, 2020
Maintenance method of plasma processing apparatus
TOKYO ELECTRON LTD0 citations41
US10510514B2Dec 17, 2019
Gas supply mechanism and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD0 citations39