Inventor
KANG JUNGSU
CN3 patents
Patents
3 patentsUS12369296B2Jul 22, 2025
Manufacturing method of semiconductor structure and semiconductor structure
CHANGXIN MEMORY TECH INC0 citations49
US12198932B2Jan 14, 2025
Method of manufacturing semiconductor structure including spacer filler etch and stacked mandrel layers and semiconductor structure
CHANGXIN MEMORY TECH INC0 citations48
US11348820B2May 31, 2022
Installation fixture for electrode plate of semiconductor equipment
CHANGXIN MEMORY TECH INC0 citations35