Inventor
KANG HYEONGMO
KR3 patents
Patents
3 patentsUS11545341B2Jan 3, 2023
Plasma etching method and semiconductor device fabrication method including the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US12020903B2Jun 25, 2024
Plasma etching method and semiconductor device fabrication method including the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US12381070B2Aug 5, 2025
Substrate treatment apparatus and semiconductor device manufacturing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations48