Inventor

LAU CHI K

US2 patents

Patents

2 patents

US4545116AOct 8, 1985

Method of forming a titanium disilicide

TEXAS INSTRUMENTS INC60 citations90

US4587718AMay 13, 1986

Process for forming TiSi2 layers of differing thicknesses in a single integrated circuit

TEXAS INSTRUMENTS INC32 citations86